IP Library › Granted Patent US 6,649,488
Granted Patent Utility
US 6,649,488 · App. 10/304,696

Method of shallow trench isolation

Inventors: Jae-Suk Lee, Dae Heok Kwon
Patented Case View Patent ↗
Granted: Nov 18, 2003 Filed: Nov 27, 2002
Inventors
Jae-Suk Lee
Dae Heok Kwon
Assignee (at issue)
Dongbu Electronics, Co. Ltd.

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Quick Facts
Patent No.
US 6,649,488
App. No.
10/304,696
Filed
2002-11-27
Granted
2003-11-18
Kind
B2