Granted Patent
Utility
US 6,649,883 · App. 09/834,118
Method of calibrating a semiconductor wafer drying apparatus
Inventors:
Yoshio Iwamoto, James C. Lenk, Philip Schmidt, Craig Spohr, Leslie George Stanton
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Apr 12, 2001
Inventors
Yoshio Iwamoto
James C. Lenk
Philip Schmidt
Craig Spohr
Leslie George Stanton
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.