Granted Patent
Utility
US 6,649,919 · App. 09/960,224
Real time monitoring simultaneous imaging and exposure in charged particle beam systems
Inventors:
Peter Chao, Steve Rosenberg
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Sep 20, 2001
Inventors
Peter Chao
Steve Rosenberg
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.