Granted Patent
Utility
US 6,649,987 · App. 09/975,119
MEMS hybrid structure having flipped silicon with external standoffs
Inventors:
Bryan P. Staker, Douglas L. Teeter, Jr., Andres Fernandez, David T. Amm
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Oct 9, 2001
Inventors
Bryan P. Staker
Douglas L. Teeter, Jr.
Andres Fernandez
David T. Amm
Assignee (at issue)
Glimmerglass Networks, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.