Granted Patent
Utility
US 6,652,650 · App. 10/229,415
Modified susceptor for use in chemical vapor deposition process
Inventors:
Charles C. Yang, Robert W. Standley
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Aug 28, 2002
Inventors
Charles C. Yang
Robert W. Standley
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.