Granted Patent
Utility
US 6,652,708 · App. 10/041,027
Methods and apparatus for conditioning and temperature control of a processing surface
Inventor:
Emil A. Kneer
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Dec 28, 2001
Inventor
Emil A. Kneer
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.