Granted Patent
Utility
US 6,652,910 · App. 09/683,742
Apparatus and method for controlling coating solution level within substrate
Inventors:
Sean X. Pan, Mark C. Petropoulos
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Feb 8, 2002
Inventors
Sean X. Pan
Mark C. Petropoulos
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.