Granted Patent
Utility
US 6,656,021 · App. 09/940,880
Process for fabricating a semiconductor device
Inventors:
Katsuhiro Ota, Akio Saito
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Aug 29, 2001
Inventors
Katsuhiro Ota
Akio Saito
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.