Granted Patent
Utility
US 6,656,540 · App. 09/926,624
Method for forming metallic film and apparatus for forming the same
Inventors:
Hitoshi Sakamoto, Toshihiko Nishimori, Saneyuki Goya, Takao Abe, Noriaki Ueda
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Nov 27, 2001
Inventors
Hitoshi Sakamoto
Toshihiko Nishimori
Saneyuki Goya
Takao Abe
Noriaki Ueda
Assignee (at issue)
MITSUBISHI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.