Granted Patent
Utility
US 6,656,643 · App. 09/785,116
Method of extreme ultraviolet mask engineering
Inventors:
Subhash Gupta, Mei Sheng Zhou
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Feb 20, 2001
Inventors
Subhash Gupta
Mei Sheng Zhou
Assignee (at issue)
Chartered Semiconductor Manufacturing LTD
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.