Granted Patent
Utility
US 6,656,798 · App. 09/965,919
Gate processing method with reduced gate oxide corner and edge thinning
Inventors:
Helmut Tews, Oleg Gluschenkov, Mary E. Weybright
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Sep 28, 2001
Inventors
Helmut Tews
Oleg Gluschenkov
Mary E. Weybright
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.