Granted Patent
Utility
US 6,656,816 · App. 10/142,700
Method for manufacturing semiconductor device
Inventor:
Yugo Tomioka
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: May 10, 2002
Inventor
Yugo Tomioka
Assignee (at issue)
UMC Japan
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.