Granted Patent
Utility
US 6,656,838 · App. 10/150,950
Process for producing semiconductor and apparatus for production
Inventors:
Tomoji Watanabe, Akiko Kagatsume, Tadanori Yoshida
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: May 21, 2002
Inventors
Tomoji Watanabe
Akiko Kagatsume
Tadanori Yoshida
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.