IP Library › Granted Patent US 6,656,848
Granted Patent Utility
US 6,656,848 · App. 10/133,931

Plasma chamber conditioning

Inventors: John Scanlan, Kevin J. O'Leary, Barry Coonan
Patented Case View Patent ↗
Granted: Dec 2, 2003 Filed: Apr 26, 2002
Inventors
John Scanlan
Kevin J. O'Leary
Barry Coonan
Assignee (at issue)
Scientific Systems Research Limited

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Quick Facts
Patent No.
US 6,656,848
App. No.
10/133,931
Filed
2002-04-26
Granted
2003-12-02
Kind
B1