Granted Patent
Utility
US 6,656,894 · App. 09/732,414
Method for cleaning etcher parts
Inventors:
Darryl Peters, Roberto Rovito
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Dec 7, 2000
Inventors
Darryl Peters
Roberto Rovito
Assignee (at issue)
Ashland, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.