Granted Patent
Utility
US 6,659,634 · App. 10/282,116
Chemical solution feeding apparatus and method for preparing slurry
Inventors:
Naoki Hiraoka, Hiroshi Osuda, Hotaka Yamamoto
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Oct 29, 2002
Inventors
Naoki Hiraoka
Hiroshi Osuda
Hotaka Yamamoto
Assignee (at issue)
Fujitsu VLSI Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.