Granted Patent
Utility
US 6,660,140 · App. 09/477,819
Sputtering apparatus
Inventors:
Keith Edward Buchanan, Stephen Burgess, Paul Rich
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Jan 5, 2000
Inventors
Keith Edward Buchanan
Stephen Burgess
Paul Rich
Assignee (at issue)
Trikon Holdings Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.