Granted Patent
Utility
US 6,660,639 · App. 10/266,169
Method of fabricating a copper damascene structure
Inventors:
Yuzhuo Li, Jason Keleher
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Oct 7, 2002
Inventors
Yuzhuo Li
Jason Keleher
Assignee (at issue)
Ferro Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.