IP Library › Granted Patent US 6,660,643
Granted Patent Utility
US 6,660,643 · App. 09/261,616

Etching of semiconductor wafer edges

Inventors: Michael J. Kardauskas, Bernhard P. Piwczyk
Patented Case View Patent ↗
Granted: Dec 9, 2003 Filed: Mar 3, 1999
Inventors
Michael J. Kardauskas
Bernhard P. Piwczyk
Assignee (at issue)
RWE Schott Solar GmbH

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Quick Facts
Patent No.
US 6,660,643
App. No.
09/261,616
Filed
1999-03-03
Granted
2003-12-09
Kind
B1