Granted Patent
Utility
US 6,661,009 · App. 10/159,790
Apparatus for tilting a beam system
Inventors:
Alexander Groholski, Riccardo Drainoni, Michael Tanguay
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: May 31, 2002
Inventors
Alexander Groholski
Riccardo Drainoni
Michael Tanguay
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.