Granted Patent
Utility
US 6,663,674 · App. 10/126,372
Method of handling a silicon wafer
Inventors:
Michael Tucker, Terry A. Breeden, Stefan Ottow, Wolfram Kostler, Dan Wissel
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Apr 19, 2002
Inventors
Michael Tucker
Terry A. Breeden
Stefan Ottow
Wolfram Kostler
Dan Wissel
Assignees (at issue)
Infineon Technologies SC 300 GmbH & Co. KG
Infineon Technologies AG
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.