Granted Patent
Utility
US 6,663,791 · App. 09/632,039
Detection method of coating film thickness and ion implantation equipment using this method
Inventor:
Hiroshi Kawaguchi
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Aug 3, 2000
Inventor
Hiroshi Kawaguchi
Assignee (at issue)
Sumitomo Eaton Nova Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.