Granted Patent
Utility
US 6,664,009 · App. 09/917,581
Method and apparatus for allowing phase conflicts in phase shifting mask and chromeless phase edges
Inventor:
Hua-Yu Liu
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Jul 27, 2001
Inventor
Hua-Yu Liu
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.