Granted Patent
Utility
US 6,664,026 · App. 09/815,540
Method of manufacturing high aspect ratio photolithographic features
Inventors:
Son V. Nguyen, Neil Leslie Robertson, Thomas Edward Dinan, Thao Pham
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Mar 22, 2001
Inventors
Son V. Nguyen
Neil Leslie Robertson
Thomas Edward Dinan
Thao Pham
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.