Granted Patent
Utility
US 6,664,540 · App. 09/778,459
Microprobe and sample surface measuring apparatus
Inventors:
Nobuhiro Shimizu, Yoshiharu Shirakawabe, Hiroshi Takahashi, Chiaki Yasumuro
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Feb 7, 2001
Inventors
Nobuhiro Shimizu
Yoshiharu Shirakawabe
Hiroshi Takahashi
Chiaki Yasumuro
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.