Granted Patent
Utility
US 6,664,557 · App. 09/812,535
In-situ detection of thin-metal interface using optical interference
Inventor:
Sundar Amartur
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Mar 19, 2001
Inventor
Sundar Amartur
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.