Granted Patent
Utility
US 6,664,584 · App. 09/999,281
Metal oxynitride capacitor barrier layer
Inventors:
Sam Yang, Vishnu Kumar Agrawal
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Nov 30, 2001
Inventors
Sam Yang
Vishnu Kumar Agrawal
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.