Granted Patent
Utility
US 6,665,575 · App. 09/683,569
Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment
Inventors:
Manoj Betawar, Vrunda Bhagwat, Dinesh Goradia, Manish C. Mehta, Nitin S. Parekh
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Jan 18, 2002
Inventors
Manoj Betawar
Vrunda Bhagwat
Dinesh Goradia
Manish C. Mehta
Nitin S. Parekh
Assignee (at issue)
FabCentric, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.