Granted Patent
Utility
US 6,665,576 · App. 10/206,067
Method and system for managing semiconductor manufacturing equipment
Inventor:
Shunji Hayashi
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Jul 29, 2002
Inventor
Shunji Hayashi
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.