Granted Patent
Utility
US 6,667,552 · App. 09/252,186
Low dielectric metal silicide lined interconnection system
Inventor:
Matthew S. Buynoski
Patented Case
View Patent ↗
Granted: Dec 23, 2003
Filed: Feb 18, 1999
Inventor
Matthew S. Buynoski
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.