Granted Patent
Utility
US 6,668,641 · App. 10/032,259
Apparatus and method for thermal dissipation in a thermal mass flow sensor
Inventors:
Jesse E. Ambrosina, Ali Shajii
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Dec 21, 2001
Inventors
Jesse E. Ambrosina
Ali Shajii
Assignee (at issue)
MKS Instruments, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.