Granted Patent
Utility
US 6,669,779 · App. 09/800,060
Yield and line width performance for liquid polymers and other materials
Inventors:
Emir Gurer, Ed C. Lee, Murthy Krishna, Reese Reynolds, John Salois, Royal Cherry
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Mar 5, 2001
Inventors
Emir Gurer
Ed C. Lee
Murthy Krishna
Reese Reynolds
John Salois
Royal Cherry
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.