Granted Patent
Utility
US 6,670,568 · App. 10/014,245
Installation for processing wafers
Inventor:
Michael B. Goetzke
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Nov 7, 2001
Inventor
Michael B. Goetzke
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.