Granted Patent
Utility
US 6,670,646 · App. 10/074,479
Mask and method for patterning a semiconductor wafer
Inventors:
Zhijian Lu, Shahid Butt, Alois Gutmann
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Feb 11, 2002
Inventors
Zhijian Lu
Shahid Butt
Alois Gutmann
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.