Granted Patent
Utility
US 6,673,255 · App. 09/925,646
Plasma treatment apparatus and method for operating same
Inventors:
Alexander Marxer, Andreas Meyerhans, Fredy Zuend
Patented Case
View Patent ↗
Granted: Jan 6, 2004
Filed: Aug 10, 2001
Inventors
Alexander Marxer
Andreas Meyerhans
Fredy Zuend
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.