Granted Patent
Utility
US 6,673,524 · App. 09/780,275
Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication method
Inventors:
Kouros Ghandehari, Bruno M. LaFontaine, Bhanwar Singh
Patented Case
View Patent ↗
Granted: Jan 6, 2004
Filed: Feb 9, 2001
Inventors
Kouros Ghandehari
Bruno M. LaFontaine
Bhanwar Singh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.