Granted Patent
Utility
US 6,673,639 · App. 10/072,997
Method and system for evaluating polysilicon, and method and system for fabricating thin film transistor
Inventors:
Hiroyuki Wada, Nobuhiko Umezu, Koichi Tatsuki
Patented Case
View Patent ↗
Granted: Jan 6, 2004
Filed: Feb 12, 2002
Inventors
Hiroyuki Wada
Nobuhiko Umezu
Koichi Tatsuki
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.