IP Library Granted Patent US 6,674,633
Granted Patent Utility
US 6,674,633 · App. 09/797,005

Process for producing a strontium ruthenium oxide protective layer on a top electrode

Inventors: Shan Sun, George Hickert, Katsuyoshi Matsuura, Takeyasu Saito, Soichiro Ozawa, Naoyuki Satoh, Mitsushi Fujiki, Satoru Mihara, Jeffrey Scott Cross, Yoshimasa Horii
Patented Case View Patent ↗
Granted: Jan 6, 2004 Filed: Feb 28, 2001
Inventors
Shan Sun
George Hickert
Katsuyoshi Matsuura
Takeyasu Saito
Soichiro Ozawa
Naoyuki Satoh
Mitsushi Fujiki
Satoru Mihara
Jeffrey Scott Cross
Yoshimasa Horii
Assignee (at issue)
Fujitsu Limited

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Quick Facts
Patent No.
US 6,674,633
App. No.
09/797,005
Filed
2001-02-28
Granted
2004-01-06
Kind
B2