Granted Patent
Utility
US 6,675,666 · App. 10/137,046
Substrate transportation apparatus
Inventors:
Norio Maruyama, Daisuke Yokoi, Yasuo Mori, Yoshihisa Taniguchi
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: May 1, 2002
Inventors
Norio Maruyama
Daisuke Yokoi
Yasuo Mori
Yoshihisa Taniguchi
Assignee (at issue)
Olympus Optical Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.