Granted Patent
Utility
US 6,676,493 · App. 10/033,615
Integrated planarization and clean wafer processing system
Inventors:
Aleksandar Owczarz, Yehiel Gotkis
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Dec 26, 2001
Inventors
Aleksandar Owczarz
Yehiel Gotkis
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.