Granted Patent
Utility
US 6,676,718 · App. 10/005,253
Polishing of semiconductor substrates
Inventors:
Qiuliang Luo, Qianqiu (Christine) Ye, Kelly Block
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Dec 4, 2001
Inventors
Qiuliang Luo
Qianqiu (Christine) Ye
Kelly Block
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.