Granted Patent
Utility
US 6,676,822 · App. 09/607,567
Method for electro chemical mechanical deposition
Inventor:
Homayoun Talieh
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Jun 29, 2000
Inventor
Homayoun Talieh
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.