IP Library › Granted Patent US 6,677,233
Granted Patent Utility
US 6,677,233 · App. 10/039,095

Material deposition from a liquefied gas solution

Inventor: Valery M. Dubin
Patented Case View Patent ↗
Granted: Jan 13, 2004 Filed: Jan 2, 2002
Inventor
Valery M. Dubin
Assignee (at issue)
Intel Corporation

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Quick Facts
Patent No.
US 6,677,233
App. No.
10/039,095
Filed
2002-01-02
Granted
2004-01-13
Kind
B2