IP Library › Granted Patent US 6,677,286
Granted Patent Utility
US 6,677,286 · App. 10/191,060

Compositions for removing etching residue and use thereof

Inventors: Roberto Rovito, David Barry Rennie, Dana L. Durham
Patented Case View Patent ↗
Granted: Jan 13, 2004 Filed: Jul 10, 2002
Inventors
Roberto Rovito
David Barry Rennie
Dana L. Durham
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 6,677,286
App. No.
10/191,060
Filed
2002-07-10
Granted
2004-01-13
Kind
B1