Granted Patent
Utility
US 6,678,037 · App. 09/971,769
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Jan Van Elp, Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Oct 9, 2001
Inventors
Jan Van Elp
Martinus Hendrikus Antonius Leenders
Vadim Yevgenyevich Banine
Hugo Matthieu Visser
Levinus Pieter Bakker
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.