Granted Patent
Utility
US 6,678,055 · App. 09/991,709
Method and apparatus for measuring stress in semiconductor wafers
Inventors:
Ofer Du-Nour, Yaron Ish-Shalom
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Nov 26, 2001
Inventors
Ofer Du-Nour
Yaron Ish-Shalom
Assignee (at issue)
Tevet Process Control Technologies Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.