Granted Patent
Utility
US 6,680,261 · App. 10/133,087
Method of reducing boron outgassing at trench power IC's oxidation process for sacrificial oxide layer
Inventors:
Jen-Te Chen, Kou-Liang Jaw, Mao-Song Tseng, Kou-Wei Yang
Patented Case
View Patent ↗
Granted: Jan 20, 2004
Filed: Apr 25, 2002
Inventors
Jen-Te Chen
Kou-Liang Jaw
Mao-Song Tseng
Kou-Wei Yang
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.