Granted Patent
Utility
US 6,680,621 · App. 09/851,291
Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current
Inventors:
Alexander Savtchouk, Jacek Lagowski, John F. D'Amico, Marshall D. Wilson, Lubomir L. Jastrzebski
Patented Case
View Patent ↗
Granted: Jan 20, 2004
Filed: May 8, 2001
Inventors
Alexander Savtchouk
Jacek Lagowski
John F. D'Amico
Marshall D. Wilson
Lubomir L. Jastrzebski
Assignee (at issue)
Semiconductor Diagnostics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.