Granted Patent
Utility
US 6,681,787 · App. 10/006,774
System and method of operation of a digital mass flow controller
Inventors:
Kenneth E. Tinsley, Faisal Tariq
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Dec 6, 2001
Inventors
Kenneth E. Tinsley
Faisal Tariq
Assignee (at issue)
Mykrolis Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.