Granted Patent
Utility
US 6,682,575 · App. 10/092,406
Methanol-containing silica-based CMP compositions
Inventor:
Robert Vacassy
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Mar 5, 2002
Inventor
Robert Vacassy
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.